On January 21-25 2001, the International conference MEMS 2001 took place in Interlaken, Switzerland. Debiotech was selected to present two scientific contributions on its Microsystems technology:

• The ChronoJet^TM device was the subject of an oral presentation entitled
  
  
  "A HIGH-PERFORMANCE SILICON MICROPUMP FOR DISPOSABLE DRUG DELIVERY SYSTEMS"
  
  
  download the full article PDF format (762Kb).
  
  
  
  
• The ChronoFlow^TM device was presented as a poster entitled
  
  
  "IMPROVED MICRO-FLOW REGULATOR FOR DRUG DELIVERY SYSTEMS"
  
  
  download the full article PDF format (852Kb).

This paper describes the design, fabrication and experimental results of a new, low cost, high-performance silicon micropump developed for a disposable drug delivery system. The pump chip demonstrates linear and accurate (±5%) pumping characteristics for flow rates up to 2 ml/h with intrinsic insensitivity to external conditions. The stroke volume of 160 nl is maintained constant by the implementation of a double limiter acting on the pumping membrane. The actuator is dissociated from the pump chip.

The chip is a stack of three layers, two Pyrex wafers anodically bonded to the central silicon wafer. The technology is based on the use of SOI technology, silicon DRIE and the sacrificial etch of the buried oxide in order to release the structures. The result is a small size chip, suitable for cost-effective manufacturing in high volume.

The micropump chip is integrated into the industrial development of a miniature external insulin pump for diabetes care.

download the full article PDF format (762Kb)

The paper reports on the design, manufacturing, and experimental testing of a micromachined pressure compensating flow regulator. This device was designed to provide a constant liquid flow rate of 1 ml/hr within a pressure difference of 100 to 600 mbar. At pressures higher than 600 mbar the device is designed to block the flow, preventing an over-delivery of medicine. Structural and fluidic simulations were used to design the geometry of the device before manufacturing. After manufacturing, over 50 devices have been characterized experimentally. The experimental results demonstrate the credibility of the design, the accuracy of the flow rate and the long-term stability of the device. One application of this device is the replacement of the flow restrictor in an elastomeric infusion system, which will increase the accuracy and safety of the drug delivery system. This pressure compensating flow regulator is passive, hence it needs no external energy source. The device is relatively inexpensive to manufacture and is therefore, potentially a disposable unit in a microfluidic system. Finally, it is small and lightweight, ideal for portable applications.

download the full article PDF format (852Kb)